RF magnetron sputtering Oxide materials Optical properties Fluorescence Nanostructured materials Infrared absorption Nanoparticles Friction Oxide interface Matériaux hybrides Nanostructuring Epitaxy Hafnium silicate Neodymium High-k dielectrics Sputtering Rare-earth ions Waveguides Oxides Conductivity Si nanocluster Silicon photonics Photovoltaic Rare earths Microstructure physique AFM GENOMIQUE Energy transfer IR spectroscopy Hybrid materials Microstructure Nanostructures Nanoparticules Hafnium silicates Terres rares Multilayers M-lines Lifetime Waveguide ADE-FDTD Pulsed laser deposition Irradiation Quantum-well Doping Optical amplifiers Luminescence Rare earth Silicon nanocrystals Copper Cathodoluminescence Guide d'onde Electron paramagnetic resonance Laser pyrolysis Atom probe tomography Si-rich silicon oxide Silicium PZT Semiconductors Couches minces Couches minces semi-conductrices XRD Reactive magnetron sputtering Silicon nitride Erbium Thin film Silicon Silicon nanoclusters Pulvérisation cathodique MoS2 CO adsorption Hillocks Liposomes Cerium Down-conversion Pulvérisation magnétron radiofréquence Magnetron sputtering Citric acid Computational electromagnetic methods Radiofrequency magnetron sputtering Structural properties SiC Nanostructure Refractive index Oxygen vacancies HR STEM-HAADF Raman scattering Photoluminescence Films Raman Thin films CoMoS Feature erasure Crystal structure Microstructure physics FTIR Grazing incidence X-ray diffraction Terbium Phase transition Electroluminescence Al2O3